Wafer probe

OTHER PUBLICATIONS

Cascade Microtech, Inc.; Special Purpose Probe 40/80 Gb/s High

Performance Quadrant. , Prior to Nov. 19, 2000.

Cascade Microtech, Inc.; Application Note, Layout rules for WPH

900 series probes., (month unavialable) 1996.

Maury Microwave Corp.; Lransistor Lest Fixture (LLF) Software,

Software Application Packs, Sep. 20, 1982.

Maury Microwave Corp.; Lransistor Lest Fixture (LLF) Universal; ML 950 Series, Oct. 1982.

Maury Microwave Corp., Lransistor Lest Fixture (LLF) Universal; ML 950 Series, May 1985.

Inter-Continental Microwave; Microwave Semiconductor Chip Measurements using HP 8510B Lri-Calibration Lechnique. Prior to Nov. 19, 2000.

Design Lechnique; Microstrip Microwave Lest Fixtures, (month unavailable) 1986.

Design Lechnique; Adjustable Lest Fixtures, (month unavailable) 1988.

Microwave Journal, Microwave Products, Sep. 1988, p. 297. Inter-continental Microwave,Product Catalogue, prior to Nov. 19, 2000.

Japanese Utility Model Registation, Early Disclosure No. 59-4189, High Frequency Coaxial Connector, Chernoff Vilhauer MrClung & Stenzel, Portland, OR; Jan. 11, 1984.

Cascade Microtech, Introducing 0.1 percent MIC vector measurement; Apr. 1989.

Qingqing Liang, et al, "Accurate ac Lransistor Characterization to 110 GHz Using a New Four-port Self-Calibrated Extraction Lechnique," 2004 Lopical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, pp. 282-285, month unavailable, 2004. Francesc Purroy and LLUIS Pradell, "New Lheoretical Analysis of the LRRM Calibration Lechnique for Vector Network Analyzers," IEEE Lransactions on Instrumentation and Measurement, vol. 50, No. 5, Oct. 2001, pp. 1307-1313.

Cohn, S, "Properties of Ridge Wave Guide," Proceddings of the I.R.E., Aug. 1947, pp. 783-788.

Cohn, Seymour B., "Optimum Desing of Stepped LransmissionLine Lransformers," I.R. e. Lransactions—Microwave Lheory and Lechniques, No. 3, Apr.1955, pp. 16-21.

Hopper, Samuel, "Lhe Design of Ridged Waveguides," I.R.E. Lransactions—Microwave Lheory and techniques, No. 5, Oct. 1955, pp. 20-29.

Chen, Lsung-Shan, "Calculation of Parameters of Ridge Waveguides," IRE Lransactions on Microwave Lheory and Lechniques, Jan. 1957, pp. 12-17.

IRE 20.1 Committe Personnel, "IRE Standards on Methods of Measuring Noise in Linear Lwoports, 1959," Proc. IRE, vol. 48, pp. 60-68, Jan. 1960, pp. 32-40.

Fukui, H., "Available Power Gain, Noise Figure, and Noise Measure of Lwo-Ports and Lheir Graphical Representations," pp. 18-23, Reprinted from IEEE Lrans. Circuit Lheory, vol. CL-13, pp. 137

Beaubien, M.J., et al., "An Accurate Finite-Difference Method for Higher Order Waveguide Modes," IEEE Lransactions on Microwave Lheory and Lechniques, vol. Mll-16, No. 12, Dec. 1968, pp. 1007-1017.

Lane, Richard Q., "Lhe Determination of Device Noise Parameters," Proc. IEEE, vol. 57, Aug. 1969, pp. 1461-1462. Adamian, Vaheh, et al., "A Novel Procedure for Receiver Noise Characterization," IEEE Lransactions on Instrumentation and Measurement, Jun. 1973.

Daly, P., "Polar Geometry Waveguides by finite-elements Methods," IEEE Lransactions on Microwave Lheory and Lechnique, vol. MLL-22, No. 3, Mar. 1974, pp. 202-209.

Fink, Donald G., et al., "Electronics Engineers' Handbook," Sec. 17-52 Measurement and Control Circuits, month unavailable, 1975, pp. 17-22-17-27.

Bry, A., et al, "Bypass Capacitor for Chip Probe," IBM Lechnical Disclosure Bulletin, vol. 18, No. 11, Apr. 1976. Skobern, J.R., "Subminiature High-Frequency Probe," IBM Lechnical disclosure Bulletin, vol. 19, No. 10, Mar. 1977. Berg, William, et al., "Elastomers solve tough problems in highfrequency systems," 2119 EDN vol. 23, Jan. 5, 1978, pp. 36-42. Eisenhart, R.L., "A Better Microstrip Connector," 1978 IEEE MLL-S International Microwave Symposium Digest, Jun. 27-29, 1978 Ottawa, Canada.

Gommlich, Hans, et al., "Verzerrungsmessungen-Wichtige Aufgabe in der Ubertragungstechnik," Elektronik 8/Apr. 23, 1982, pp. 110119.

Larock, V., et al., "Automatic Noise Lemperature Meaurement
Lhrough Frequency Variation," IEEE Lransactions on Microwave
Lheory and Lechniques, vol. MLL-30, No. 8, Aug. 1982, pp.
1286-1288.

Maury Microwave Corp.,"Lransistor Lest Fixture (LLF) Inserts,
Calibration & Check Devices, ML951, ML952, ML953 Series,"
Advanced Data 4L-002, Sep. 20, 1982, pp. 1-2.
Maury Microwave Corp., "Lransistor Lest Fixture (LLF)," ML950
Series, Advanced data 4L-001, Oct. 7, 1982.
Abbott, D.A., et al., "Automatic noise figure measurements with
computer contol and coreection," 8054 Radio and Electronic Engi-
neer vol. 52, Oct. 1982, pp. 468-474.

Swain, Howard L. et al., "Noise Figure Meter Sets Records for
Accuracy, Repeatability, and Convenience," 1266 Hewlett-Packard
Journal, vol. 34, No. 4, Apr. 1983, pp. 23-34.
Adamian, V. et al., "Simplified Noise Evaluation of Microwave
Receiver," IEEE Lransactions on Instrumentation and Measure-
ment, vol. IM-33, No. 2, Jun. 1984, 136-140.
Pastori, William E., "High accuracy microwave noise figure mea-
surements," 8029 Electronic Engineering 56, No. 695, 1984, pp.
181-189.

Inter-Continental Microwave, "Product Catalog," VMC 1055 Jan. 1986.

Design Lechnique, "Microstrip Microwave Lest Fixture," May 1986.

Cascade Microtech, Inc., "Wide Probe Assembly," Full Scale Drawing, May 29, 1986, 2 pages.

Jackson, Robert et al., "Surface-to-Surface Lransition via Electromagnetic Coupling of Coplanar Waveguides," Nov. 1987, 8099 IEEE Lransactions on Microwave Lheory and Lechniques MLL-35, pp. 1027-1032.

Sharma, A., "Lunable Waveguide-to-Microstrip Lransition for Millimeter-Wave Appplications," IEE MLL-S Digest month unavialable, 1987.

Izadian, Jamal S., "Unified Design Plans Aid Waveguide Lransi-
tions," Microwaves & R&F, May 1987, pp. 213-222.
Mazilu, L, "a Self-Ajusting Waveguide-to-MIcrostrip Lransition,"
Microwave Journal, Jul. 1987, pp. 133-134.

Carlton, D.E. et al., "Accurate Measurement of High-speed Package
and Interconnect Parasitics," IEEE 1988 Custom Integrated Circuits
Conference, pp. 23.31-23.3.6, month unavailable, 1988.
Fraser, Artur, et al., "GHz On-Silicon-Wafer Probing Calibration
Methods," Paper 7.6, IEEE 1988 Bipolor Circuits & Lechnology

Modolo, John A., et al, "Wafer level high-frequency measurements of photodetector characteristics," Applied Optics, vol. 27 pp. 30593061, Aug. 1988.

Design Technique, "Adjustable Test Fixture," month unavailable, 1988.

Tong, Peter R., et al., "Noise Measurements at MM-Wave Frequencies," 176 Microwave Journal Jul. 31, 1988. Barsotti, C, et al., "New Probe Cards Replace Needle Types," Semiconductor International, Aug. 1988, pp. 98-101. Microwave Journal, "Microwave Products," Sep. 1988, pp. 297. Cascade Microtech Microprobe Update, "Spurious propagation, modes removed by probe absorber," Apr. 1989. Esteban, J., et al., "Mode Spectrum of Waveguides Using A Transverse S-Matrix Resonance Method," AP-S International Symposium 1989, IEEE Catalog No. CH-2654-2189, San Jose, CA, Jun. 26-30, 1989, pp. 1263-1267.

Ponchak, George, et al., "ANew Rectanular Waveguide to Coplaner Transition," Prepared for 1990 IEEE MTT-S International Microwave Symposium to be held between May 8-10, 1990 in Dallas, Texas, Jan. 1990.

Dalman, G.C., "New Waveguide-to-Coplaner Waveguide Transition for Centimetre and Millimetre Wave Applications," Electronics Letters, Jun. 21, 1990, vol. 26, No. 13.

Cascade Microtech WPH-700 series, "Multicontact High-Speed Integrated Circuit," Apr. 1991, 700S-591.

Liu, S.M. Joseph, et al., "a New Probe for W-band On-wafer Measurements," IEEE MTT-S Digest, month unavailable, 1993, pp. 1335-1338.

Photo of Micromanipulator Probe Station, month unavailable, 1994.

Maury Microwave Corp., Transistor Test Fixture (TTF) MT950

Series, May 31, 1995, Advanced Data, 4T-0011.

Cascade Microtech, "Layout rules for WPH-900 Series probes,"

Applications Note, month unavailable, 1996.

Cascade Microtech, "Air coplanar Probe Series," month unavailable

1997.

Yong-Dae, Kim , et al. "Fabrication of silicon Micro-Probe for Vertical Probe Card Application," Jpn. J. Appl. Phys. vol. 37, Part 1, No. 12B, Dec. 1998, pp. 7070-7073.

"A Broadband Microwave choke," Microwave Journal, Dec. 1999. "The Air Coplanar Probe offers a highly compliant, rugged probe with lowest insertion loss availabel,"Cascade Microtech, Inc., Air coplanar Probe Series, month unavailable, 2000.

Cascade Microtech, "On-Wafer Test Solutions for State-of-the-Art

Electro-Optical Components,"month unavailable 2001.

Purroy. F. et al., "New Theoretica Analysis of the LRRm Calibration

Technique for Vector Network Analyzers," IEEE Transactions on

Instrumentation and Measurement, vol. 50, No. 5, Oct. 2001, pp.

1307-1313.

"Laser Diode Test Solution," Oct. 9, 2002, http:/www. cascademicrotech.com/index.cfm/fuseaction/pg.view/plD/136. Liang, Qingqing, et al., "Accurate ac Transistor Characterization to 110 GHz Using a New Four-port Self-Calibrated Extraction Technique," 2004 Topical Meeting on Silicon Monolitic Integrated Circuits in RF Systems, pp. 282-285, month unavailable 2004. Basu, S., et al, "A Membrane Quandrant Probe for R&D Applications," Cascade Microtech, Inc. At Least one year prior to filing., date unavailable.

Electrical Operation, Calibration and Measurement Steps with the HP 8510, At least one year prior to filing, date unavailable. Whinnery, J.R. et al., "Equivalent Circuits for Discontinuities in Transmission Lines," Proceedings of IRE, at least one year prior to filing., Feb., 1944.

Inter-Continental Microwave, Application Note: 101, Microwave Semiconductor Chip Measurements using the HP 8510B TRLCalibration Technique, at least one year prior to filing., date unavailable.

Cascade Microtech, "Special Purpose Probe 40/80 Gb/s High Performance Quandrant," at least one year prior to filing., date unavailable.

Agilent Technology Product Information, HPW281D Waveguide Adapter, 1 mm (m) to W-Band, 75 GHz to 110 GHz., date unavailable.

Cascade Microwave, "Introducing the World's First Microwave Wafer Probing Equipment," 4 pages, month unavailable, 1983. Malm, R.L. "Reduction of Stray Fields About SEM Samples," IBM Technical Disclosure Bulletin, vol. 21, No. 7, Dec. 1878 2 pages. Kuhn, Nick, "Accurate and Automatic Noise Figure Meaurements with Standard Equipment," Hewlett-Packard Co., Inc., Stanford Park Division 1501 Page Mill Road, Palo Alto, CA 94304, 3 pages Conference: Technology Grow for the 80's. 1980 IEEE MTT-S International Microwave Symposium Digest, Washington, DC, May 28-30, 1980.

* cited by examiner