Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus,...http://www.google.se/patents/US6935010?utm_source=gb-gplus-sharePatent US6935010 - Method of fabricating a micromachined tube for fluid flow
Method of fabricating a micromachined tube for fluid flow
