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Patent

  
[graphic]
[graphic][graphic]

1

METHOD AND APPARATUS FOR
TEMPORAL AND SPATIAL BEAM
INTEGRATION

BACKGROUND OF THE INVENTION

This invention relates to optical beam delivery systems in general, and to optical beam delivery systems used with laser beams to optimize the temporal and spatial characteristics thereof.

Optical beam delivery systems are known which are used to improve the temporal and spatial characteristics of collimated beams of radiation with non-symmetrical energy profile cross sections, such as excimer laser beams. For example, in the Visx Twenty/Twenty Excimer Laser System developed by Visx Incorporated of Santa Clara, Calif., a collimated laser beam used for photorefractive keratectomy (PRK) and phototherapeutic keratectomy (PTK) is delivered to the plane of surgery by means of an optical beam delivery system which provides both spatial and temporal integration for an excimer laser beam. In this system, a collimated laser beam is first passed through a stationary spatial beam integrator comprising a plurality of prisms, which are preferably hexagonal in shape, distributed about an optical center in the form of a similar hollow space, one face of each prism being angled with respect to the central axis so that portions of a laser beam passing through each prism are refracted toward the central axis of the prism assembly. After passing through the spatial beam integrator, the laser beam is next transmitted through a temporal beam integrator comprising a dove prism which is rotated about the longitudinal optical axis in order to rotate the beam The beam emerging from the temporal beam integrator is then directed through a variable diameter aperture and delivered to the surgical plane by means of appropriate mirrors and lenses.

While highly effective in providing spatial and temporal integration to a collimated laser beam, this arrangement is extremely sensitive to the placement of the dove prism along the optical axis of the beam delivery system. In particular, any slight misalignment of the dove prism results in a multiplication of the angular error by a factor of two. Since any angular deviations radially displace the overlapping beam relative to the aperture, thereby affecting symmetry of the beam at the treatment site, extreme care must be taken in initially aligning the dove prism with respect to the beam axis and frequent periodic alignment checks must be made to ensure that the initial alignment has not been disturbed. Efforts to provide a spatial and temporal beam integration technique devoid of this disadvantage have not met with success to date.

SUMMARY OF THE INVENTION

The invention comprises a technique for temporally and spatially integrating a collimated laser beam which is relatively easy to initially align with respect to the beam axis, and which is relatively inert and insensitive to angular misalignment of the optical elements which perform the temporal beam integration.

From a process standpoint, the invention comprises a method of processing a collimated laser beam to improve the spatial and temporal characteristics thereof, the method including the steps of first passing the collimated beam through a temporal beam integrator to rotate the beam about the axis thereof at a predetermined rate, and then passing the rotating beam emerging from the temporal beam integrator through a spatial beam integrator to effect spatial integration thereof. The step of passing the collimated beam through a

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temporal beam integrator preferably includes the steps of positioning a pair of cylindrical lenses arranged in spaced relationship along the axis of the collimated beam, and rotating the pair of cylindrical lenses in unison about the 5 beam axis. The effect of this temporal integrator mechanism is a rotation of the laser beam at a rotational speed of twice the speed of rotation of the cylinder lens pair. In the preferred embodiment, the cylindrical lenses are substantially identical. In one embodiment, the spatial beam integrator is rotated about the beam axis at an angular speed greater than the speed of rotation of the cylindrical lenses, preferably at a speed which is twice the rate of rotation of the cylindrical lenses so that the follow-on spatial beam integrator is relatively stationary with respect to the rotating beam emerging from the cylindrical lenses. In another embodiment, the angular speed of rotation of the spatial beam integrator is made equal to the speed of rotation of the cylindrical lenses. In still another embodiment, the spatial beam integrator is maintained stationary, i.e., not rotated at

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The first embodiment of the method preferably includes the initial step of rotating the spatial beam integrator about the beam axis before commencing rotation of the temporal beam integrator in order to initially optimize the spatial

25 characteristics of the collimated beam transmitted through the spatial beam integrator.

From an apparatus standpoint, the invention comprises a laser beam delivery apparatus for temporally and spatially integrating a collimated laser beam, the beam delivery

30 apparatus including a pair of cylindrical lenses arranged in spaced relationship along the axis of the collimated laser beam, with the cylinder axes of the cylindrical lenses being substantially aligned. The cylindrical lenses are preferably spaced along the beam axes by an amount substantially

35 equal to the sum of the focal distance of each cylindrical lens. A spatial beam integrator is positioned in the path of the beam emerging from the cylindrical lenses.

In the preferred embodiment, two cylindrical lenses of equal refractive power, with their axes aligned and their

40 separation equal to the sum of their focal distances, are installed in the path of the laser beam. This arrangement provide a substantially equally formed, but rotating, laser beam at the exit of the integrator.

In other embodiments, two cylindrical lenses of unequal

45 refractive power, with their axes aligned and their separation equal to the sum of their focal distances, are installed into the laser beam This arrangement provides an increased or reduced, but equally rotating, laser beam at the exit of the integrator. The size of the laser beam exiting from this

50 integrator will be affected in width and height by the inverse of the ratio of the first and second integrator lenses and the sine or cosine function of the angle of the first lens to the angle of the laser beam entering such integrator. The temporal integrator apparatus includes first means for

55 rotating the cylindrical lenses about the beam axes in unison so that a beam passing through the pair of cylindrical lenses is rotated about the beam axis at twice the rotational speed of the lenses. In the preferred embodiment of the invention, the apparatus includes means for providing relative rotation

60 between the spatial beam integrator and the pair of cylindrical lenses. The providing means preferably includes second means for rotating the spatial beam integrator relative to the cylindrical lenses, and means for providing synchronous motion between the first and second rotating means. The

65 angular speed of the spatial beam integrator is preferably set to be a multiple, preferably 2, of the angular speed of rotation of the cylindrical lenses.

3 4

The spatial beam integrator preferably comprises a plu- FIG. 4 is an end view of the preferred embodiment of the

rality of hexagonal prisms distributed about a center, with invention;

each prism having a light outlet face for refracting an FIGS. 5A and 5B together constitute a schematic diagram

emerging portion of the collimated beam towards the center of a laser beam optical delivery system incorporating the

of the prism assembly, each light outlet face being preferably 5 invention; and

positioned at an angle with respect to a body axis passing mG 5C juustrates the relative orientation of FIGS. 5A

through the center of the spatial beam integrator. The center and 53

may comprise either a hollow space or an optical element nG/ 6 fc a schematic & of a t ^ ^am

such as a pnsm having a flat light outlet face. integrator uging ^ lenses of meieat focal

The apparatus further preferably includes means for per- 1° iength. mitting initial relative rotation between the spatial beam

integrator and the cylindrical lenses in order to optimize the DETAILED DESCRIPTION OF THE

spatial characteristics of the collimated beam passing there- PREFERRED EMBODIMENTS

through. The invention further may include an expanding Turning now to the drawings. FIG. 1 illustrates in sche

lens. preferably a spherical lens, positioned in the path of the 15 matic form a laser delivery apparatus according to the

beam emerging from the downstream one of the pair of invention. As seen in this figure, a collimated beam 10 from

cylindrical lenses, preferably between that lens and the a lasgr source (nQt shown) is onto me Met face of

spatial beam integrator. a tempos beam integrator generally designated with refer

The first means for rotating the cylindrical lenses about ence numeral 12. In the preferred embodiment of FIG. 1,

the beam axis preferably includes a housing for mounting 20 temporal beam integrator 12 includes a pair of substantially

the cylindrical lenses in proper alignment, a motor for identical cylindrical lenses 13.14 each arranged in the path

generating mechanical motion, and means for transferring 0f beam 10 and spaced along the beam axis by a distance

the mechanical motion to the housing. The transferring equal to the sum of the focal distances of the lenses. The

means preferably comprises a driving gear coupled to the cylindrical axes 15 of each of the lenses 13.14 are aligned

motor and a driven gear coupled to the housing and eng- 25 with respect to each other, and each lens is arranged with the

agable with the driving gear. The means for providing flat faCe normal to the beam axis, with the optical center of

relative rotation between the spatial beam integrator and the each lens 13.14 coincident with the beam axis. The convex

cylindrical lenses preferably comprises a second housing for cylindrical surface of lens 13 provides the inlet face for

mounting the spatial beam integrator, a motor for generating temporal beam integrator 12, while the convex face of

mechanical motion, and means for transferring the mechani- 30 cylindrical lens 14 forms the outlet face of the temporal

cal motion to the second housing, the transferring means beam integrator.

preferably comprising a driving gear coupled to the motor As suggested by broken Hne 17, cylindrical ienses 13,14 and a driven gear coupled to the housing and engagable with ^ mechanically linked, and as suggested by circular arrow the driving gear. The motor is preferably a single motor 18 ... lenses 13 and 14 are mounted for synchroshared between the first rotating means and the providing nous rotation about ±e beam ^ a beam 10 passes

means- through temporal beam integrator 12 as the lenses 13,14 are

In an alternate embodiment of the invention, the spatial rotated in unison, the rotated beam emerging from the outlet

beam integrator is rotated at the same rate as the cylindrical face of lens 14 is rotated twice for each complete revolution

lenses. In another alternate embodiment, the spatial beam 0f the lens pair 13, 14.

integrator is fixed and the cylindrical lenses are rotated. In 40 ^ optional beam eXpanding iens 20 is positioned in the

both of the alternate embodiments, the angular position of m of me rotated emerging from the temporal beam

the rotated beam with respect to the spatial beam integrator integrator 12 and is used to expand the beam size in those

varies with respect to time; while in the preferred applications requiring such beam expansion,

embodiment, the angular position of the rotated beam is A .. , . • * „ . u A * J -*u r

- . ... 45 A spatial beam integrator generally designated with ref

fixed with respect to the spatial beam integrator. . . , ^ . ,.„ ° . ,

ft- &■ erence numeral 25 is located in the path of the rotating beam

The invention provides both spatial and temporal integra- emerging from temporal beam integrator 12 (and optionally

tion for a collimated laser beam and is substantially less emerging from the optional beam expander lens 20). Spatial

sensitive to misalignment of the temporal beam integrator beam integrator 25 comprises a close packed array of

with respect to the beam axis. In particular, any off axis 5Q hexagonal prisms 27 clustered about the center 26 of spatial

misalignment results in multiplication by a factor of beam integrator 25. As shown in FIG. 2, the outlet face 28

approximately 0.5 times the offset, due to the use of the of ^ of me prisms 27 is angled with respect to the central

refraction principle of the cylindrical lenses, which com- axis 29 of the spatial beam integrator. As a consequence, that

pares favorably to the multiplication factor of 2 encountered portion 0f the rotated laser beam passing through each prism

with temporal beam integrators employing dove prisms. J5 is refracted towards the central axis upon emergence from

For a fuller understanding of the nature and advantages of the outlet face 28. The spatially integrated beam emerging

the invention, reference should be had to the ensuing from spatial beam integrator 25 is transmitted to follow on

detailed description taken in conjunction with the accom- optical elements and to the destination site or plane,

panying drawings. As SUggested by curved arrow 32, spatial beam integrator

BRIEF DESCRIPTION OF THE DRAWINGS 60 ^ mounted for rotational movement about the beam

axis. In the preferred embodiment, spatial beam integrator

FIG. 1 is a schematic diagram of a portion of a laser beam 25 is mounted for rotation in the same angular direction as

optical delivery system incorporating the invention; temporal beam integrator 12, but at twice the rotational rate

FIG. 2 is a schematic sectional view taken along lines of the temporal beam integrator 12. Thus, the rotated beam

2—2 of FIG. 1 of a portion of the spatial beam integrator; 65 emerging from the temporal beam integrator 12 has a fixed

FIG. 3 is a sectional view of a preferred embodiment of angular orientation with respect to spatial beam integrator 25

the invention taken along lines 3—3 of FIG. 4; (since the beam is rotated by a factor of 2 in passing through

the two cylindrical lenses 13, 14). In this embodiment, the angular orientation of spatial beam integrator 25 is initially adjusted with respect to the angular orientation of temporal beam integrator 12 with integrator 12 stationary in order to determine the angular position of spatial beam integrator 25 5 relative to beam 10 which affords the optimum spatial characteristics, i.e., smoothness, profile and homogeneity. Once this orientation has been determined, the relative angular positions of temporal beam integrator 12 and spatial beam integrator 25 are controlled during rotation of these 10 two units such that this optimum angular orientation between the beam 10 and the spatial beam integrator is maintained constant. In this way, the spatial beam integration is optimized.

In a first alternate embodiment of the invention, spatial 15 beam integrator 25 is simply locked to temporal beam integrator 12 and rotated in unison therewith. In still another alternate embodiment, the angular position of the spatial beam integrator 25 is simply fixed and only the temporal beam integrator 12 is rotated. In both of these alternate 20 embodiments, the rotated beam emerging from temporal beam integrator 12 also rotates with respect to spatial beam integrator 25. As a consequence, the initial angular alignment of spatial beam integrator 25 with respect to temporal beam integrator 12 is unnecessary. 25

FIGS. 3 and 4 illustrate a preferred embodiment of the apparatus for mounting cylindrical lenses 13,14 and spatial beam integrator prisms 27, and for rotating prisms 27 relative to lenses 13,14. As seen in these figures, cylindrical lens 13 is mounted in an aperture 41 of a hollow, generally cylindrical member 42. Cylindrical lens 14 is mounted in an aperture 44 in a second generally cylindrical member 45. Member 42 has an outer diameter sized to provide a translatable sliding fit within the inner diameter of member 45 so that the axial separation distance between lenses 13 and 14 may be adjusted.

Mounting member 45 is rotatably mounted by means of bearings 46 to a support member 48. Support member 48 also carries a drive motor 50, a motor transmission mecha- ^ nism 51 and an output shaft 53. A first driving gear 55 is mounted on shaft 53 and held in place by a friction clamp 57 which is received about a friction flange 59 attached to one face of driving gear 55. A second driving gear 61 is also mounted on shaft 53 by means of a friction clamp 57 and 45 flange 59.

Driving gear 55 is enmeshed with a first driven gear 64 which is secured to housing member 45. Driving gear 61 is engaged with a second driven gear 66 which is secured to a mounting head 69 for spatial beam integrator prisms 27. 50

In use, cylindrical lenses 13.14 are arranged within their respective apertures in members 42,45 with their cylindrical axes aligned, and the separation distance along the beam axis is adjusted until lenses 13, 14 are separated by a distance equal to the sum of the focal distances of both 55 lenses. Next, the array of hexagonal prisms 27 is mounted in member 69, and this assembly is attached to driven gear 66. This assembly is now aligned with the axis of the laser beam (indicated by the phantom line in FIG. 3), after which the laser beam profile is examined while rotating mounting head 60 69. Once the optimum relative angular position between the beam and the prisms 27 is attained, driving gear 61 is locked to shaft 53 by means of clamp 57 and friction flange 59, and driving gear 55 is likewise locked to shaft 53 (unless this step was already done prior to the initial rotational adjust- 65 ment of mounting head 69). The apparatus is now aligned and ready for use.

30

35

In use, motor 50 is operated by appropriate control signals to rotate driving gears 55, 61, and thus rotate housing members 42, 45 in bearings 46 and prisms 27. The relative rates of rotation of the lenses 13, 14 with respect to the prisms 27 are governed by the gear ratios of gears 55,61,64 and 66. As will be appreciated by those skUled in the art, these relative rates of rotation can be changed by simply using gears with different ratios, as dictated by the requirements of any particular application.

FIGS. 5A and SB illustrate the application of the invention to an ophthalmological laser surgery system FIG. 5C illustrates the relative orientation for FIGS. 5A and 5B. As seen in these figures, a collimated beam 10 from a suitable laser source 70, such as an excimer laser beam source for generating a laser beam in the far ultraviolet range with a wavelength of 193 nanometers, is directed to a beam splitter 71. Part of the beam is reflected onto an energy detector 72; the remaining portion is transmitted through the beam splitter 71 and reflected by a mirror 73 onto the inlet cylindrical face of the temporal beam integrator 12. The rotated beam emerging from integrator 12 is passed through expanding lens 20, which is a negative lens for slightly expanding the beam size, thence through spatial beam integrator 25 and onto a mirror 74. The beam reflected by mirror 74 is passed through a collimating lens 75, preferably a piano convex positive lens which reduces the beam size. The beam emanating from collimating lens 75 is directed onto a variable aperture 77, which is preferably a variable diameter iris combined with a variable width slit used to tailor the beam size and profile to a particular ophthalmological surgery procedure, such as a photorefractive keratectomy procedure. The apertured beam from variable aperture 77 is directed onto an imaging lens, preferably a biconvex singlet lens with a focal length of 125 mm The imaged beam from lens 79 is reflected by a mirror/beam splitter 80 onto the surgical plane 82 at which the apex of the cornea of the patient is positioned. A treatment energy detector 84 senses the transmitted portion of the beam energy at mirror/beam splitter 80. Beam splitter 86 and a microscope objective lens 88 are part of the observation optics. If desired, a video camera may be installed in the optical path of the apertured beam emanating from the microscope objective lens 88 to assist in viewing or recording the surgical procedure. Similarly, a heads-up display may also be inserted in the optical path of the microscope, reflecting from the beam splitter 86 to provide an additional observational capability.

In the application of the invention shown in FIGS. 5A-C, the speed of rotation of the temporal beam integrator is generally dependent upon the nature of the surgical procedure, and is specifically related to the rate at which the laser pulses are generated. In general, the rotation rate ranges from about 100 to about 200 revolutions per minute in ophthalmological surgical procedures.

As noted above, cylindrical lenses 13, 14 of temporal beam integrator 12 in the preferred embodiment described above are substantially identical and thus have equal focal lengths. If desired, cylindrical lenses having different focal lengths may be employed as shown in FIG. 6. With reference to this figure, two cylindrical lenses 113, 114 of unequal refractive power are arranged with their axes aligned as shown. Lenses 113,114 are spaced along the beam axis by a distance equal to the sum of the two focal distances fl, f2. In this embodiment, the size of the laser beam exiting from the exit side of the temporal beam integrator will be affected in width and height by the inverse of the ratio of the first and second integrator lenses 113, 114, and the sine or cosine

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