Algorithm for real-time process control of electro-polishing

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(12) United States Patent

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(Continued)

Primary Examiner—Roy King

Assistant Examiner—Michael P. Alexander

(74) Attorney, Agent, or Firm—Patterson and Sheridan

INITIAL PROFILE

COMPUTER

PROCESS CONTROL UNIT

• PROFILE DETERMINATION

• REAL TIME MONITORING

• END POINT DETECTOR

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* cited by examiner