(54) PROCESS FOR PRODUCING
HETEROPITAXIAL DIAMOND LAYERS ON
SI-SUBSTRATES
(75) Inventors: Claus-Peter Klages, Hamburg; Xin
Jiang, Pinneberg; Hans-Jiirgen Fiisser,
Gerstetten-Dettingen; Martin Hartweg,
Erbach; Reinhard Zachai, Gunzburg;
Manfred Rosier, Ulm, all of (DE)
(73) Assignee: Daimler Benz AG, Stuttgart (DE)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
(21) Appl. No.: 08/411,762
(22) PCT Filed: Oct. 1, 1993
(86) PCT No.: PCT/DE93/00936 § 371 Date: Jul. 17, 1995
§ 102(e) Date: Jul. 17, 1995
(87) PCT Pub. No.: WO94/08076 PCT Pub. Date: Apr. 14, 1994
(30) Foreign Application Priority Data
Oct. 1, 1992 (DE) 42 33 085
(51) Int. CI.7 H01L 31/0312
(52) U.S. CI 438/105; 257/77; 257/627
(58) Field of Search 257/628, 77, 627;
437/126, 131; 427/459, 461, 532, 585,
593
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* cited by examiner
Primary Examiner—Minh Loan Tran
(74) Attorney, Agent, or Firm—Barnes & Thornburg
