A fixed voltage and a movable electrode are placed face to face with each other, and an insulating film is formed on the surface of the fixed electrode. The insulating film is made of a nitride film (SiN) as a main material, with oxide films (SiO2) being formed on the front and rear surfaces of the nitride...http://www.google.se/patents/US20030102771?utm_source=gb-gplus-sharePatent US20030102771 - Electrostatic actuator, and electrostatic microrelay and other devices using the same
