A manufacturing method of a thin film apparatus, includes: a first step for forming a separation layer on a heat resistant substrate; a second step for forming a thin film device on the separation layer; a third step for providing a surface layer on the thin film device; and a fourth step for generating...http://www.google.se/patents/US6874898?utm_source=gb-gplus-sharePatent US6874898 - THIN FILM APPARATUS, A MANUFACTURING METHOD OF THE THIN FILM APPARATUS, AN ACTIVE MATRIX SUBSTRATE, A MANUFACTURING METHOD OF THE ACTIVE MATRIX SUBSTRATE, AND AN ELECTRO-OPTICAL APPARATUS HAVING THE ACTIVE MATRIX SUBSTRATE
