A window is mounted directly to an upper surface of a micromirror device chip. More particularly, the window is mounted above a micromirror device area on the upper surface of the micromirror device chip by a bead. The window in combination with the bead form a hermetic enclosure about the micromirror...http://www.google.se/patents/US6624921?utm_source=gb-gplus-sharePatent US6624921 - Micromirror device package fabrication method
