An apparatus is adapted to scribe a semiconductor wafer with a laser beam in only one direction of an axis. The apparatus includes an XY table for placing the wafer thereon, a laser beam oscillator provided above the XY table, and an optical system for permitting the laser beam to be directed onto the...http://www.google.se/patents/US4543464?utm_source=gb-gplus-sharePatent US4543464 - Apparatus for scribing semiconductor wafer with laser beam
