Methods for determining a surface voltage of an insulating film are provided. One method includes depositing a charge on an upper surface of the insulating film and measuring a current to the wafer during deposition. The method also includes determining the surface voltage of the insulating film from...http://www.google.se/patents/US7064565?utm_source=gb-gplus-sharePatent US7064565 - Methods and systems for determining an electrical property of an insulating film
