An apparatus and method for electrochemical processing of microelectronic workpieces in a reaction vessel. In one embodiment, the reaction vessel includes: an outer container having an outer wall; a distributor coupled to the outer container, the distributor having a first outlet configured to introduce...http://www.google.se/patents/US20030127337?utm_source=gb-gplus-sharePatent US20030127337 - Apparatus and methods for electrochemical processing of microelectronic workpieces
