The sensor measures diffusion of a fluorescent marker in cavities. The sensor has a Mach-Zehnder micro-interferometer having a reference arm and a measurement arm. The reference arm has a deposit of a sensitive layer whose refractive index is modified when the sensitive layer is in contact with the fluorescent...http://www.google.se/patents/US6278523?utm_source=gb-gplus-sharePatent US6278523 - Optical sensor on a silicon substrate and application for the in situ measurement of a fluorescent marker in the small bronchia
