A substrate holding apparatus prevents a substrate from slipping out and allows the substrate to be polished stably. The substrate holding apparatus has a top ring body for holding and pressing a substrate against a polishing surface, and a retainer ring for pressing the polishing surface, the retainer...http://www.google.se/patents/US7967665?utm_source=gb-gplus-sharePatent US7967665 - Substrate holding apparatus, polishing apparatus, and polishing method
