A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam contact...http://www.google.se/patents/US7514944?utm_source=gb-gplus-sharePatent US7514944 - Probe head having a membrane suspended probe
