A probe apparatus having a burn-in test function includes an apparatus body, a probe card, having a plurality of probes, for causing the plurality of probes to electrically contact a semiconductor wafer, a tester for measuring the electrical characteristics of the semiconductor wafer, heating and cooling...http://www.google.se/patents/US5568054?utm_source=gb-gplus-sharePatent US5568054 - Probe apparatus having burn-in test function
