A cleaning mechanism and method for cleaning the probe needles of a probe card used for the inspection of the electric characteristics of a wafer W. This mechanism is provided with a soft cleaner and a brush cleaner. The soft cleaner has a cleaner layer formed of rubber and inorganic filler. The brush...http://www.google.se/patents/US5968282?utm_source=gb-gplus-sharePatent US5968282 - Mechanism and method for cleaning probe needles
