A diamond film depositing apparatus and method are disclosed in which a uniform and large plasma is formed on a substrate having a diameter of larger than 100 mm without using a heated filament cathode, without applying a magnetic field thereto, and without using a ballast resistance. The thusly formed...http://www.google.se/patents/US6399151?utm_source=gb-gplus-sharePatent US6399151 - Diamond film depositing apparatus and method thereof
