A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid...http://www.google.se/patents/US6408767?utm_source=gb-gplus-sharePatent US6408767 - Low stiffness suspension for a stage
