A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage...http://www.google.se/patents/US5570994?utm_source=gb-gplus-sharePatent US5570994 - Wafer tray and ceramic blade for semiconductor processing apparatus
