A method of making a surface micro-machined accelerometer using a silicon-on-insulator (SOI) wafer structure. Both the acceleration (or deceleration) sensor and associated signal conditioning circuitry are monolithically fabricated on the same substrate. The top silicon layer of the SOI wafer...http://www.google.se/patents/US5747353?utm_source=gb-gplus-sharePatent US5747353 - Method of making surface micro-machined accelerometer using silicon-on-insulator technology 
