An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor are fabricated over their respective...http://www.google.se/patents/US6710681?utm_source=gb-gplus-sharePatent US6710681 - Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same
