A low profile, low hysteresis force feedback gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. A load cell is placed directly above a contact pin of the gimbal system to provide a very accurate feedback measurement...http://www.google.se/patents/US5899798?utm_source=gb-gplus-sharePatent US5899798 - Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
