This process consists of etching a substrate perpendicular to its surface in order to form a recess communicating therewith and in which can move laterally the flexible beam, the communication zone representing the image of the gauge to be produced, placing on the substrate surface a mask provided with...http://www.google.se/patents/US4776924?utm_source=gb-gplus-sharePatent US4776924 - Process for the production of a piezoresistive gauge and to an accelerometer incorporating such a gauge
