Carriers (10) holding parts (50) for assembling complex MEMS devices are transported to a central assembly location. The parts are stacked in a pre-assigned order and later released from their carriers. Alternatively, they are positioned over the appropriate location and released so as to fall into position...http://www.google.se/patents/US7735216?utm_source=gb-gplus-sharePatent US7735216 - Micro-electromechanical sub-assembly having an on-chip transfer mechanism
