An electric probing-test machine comprises a probe card having a plurality of probes contacted with chips of a semiconductor wafer and serving to apply test signal to a tester which judges whether circuits on the chips of the wafer are correct or deficient, a main chuck for holding the wafer at a test...http://www.google.se/patents/US5198752?utm_source=gb-gplus-sharePatent US5198752 - Electric probing-test machine having a cooling system
