An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash...http://www.google.se/patents/US6928751?utm_source=gb-gplus-sharePatent US6928751 - Megasonic cleaner and dryer system
