This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the substrate...http://www.google.se/patents/US7579257?utm_source=gb-gplus-sharePatent US7579257 - Sample separating apparatus and method, and substrate manufacturing method
