A system and method for conditioning a polishing pad in a chemical-mechanical polishing process for polishing a semiconductor device. In one aspect, a vibrating conditioning device 20 removes slurry build-up, such a slurry glaze and slurry impregnation, on the polishing pad 10 surface to enhance the...http://www.google.se/patents/US5893753?utm_source=gb-gplus-sharePatent US5893753 - Vibrating polishing pad conditioning system and method
