A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove...http://www.google.se/patents/US7900641?utm_source=gb-gplus-sharePatent US7900641 - Cleaning device and a lithographic apparatus cleaning method
