A network of electrically conductive plate contacts is provided within the structure of a DRAM chip to enable storage of non-zero voltage levels in each charge storage region. An improved cell or top plate contact provides low contact resistance and improved structural integrity making the contact less...http://www.google.se/patents/US6605532?utm_source=gb-gplus-sharePatent US6605532 - Structure for an electrical contact to a thin film in a semiconductor structure and method for making the same
