A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment,...http://www.google.se/patents/US6958846?utm_source=gb-gplus-sharePatent US6958846 - Spatial light modulators with light absorbing areas
