A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about...http://www.google.se/patents/US7695232?utm_source=gb-gplus-sharePatent US7695232 - Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
