A substrate support having heat transfer enhancing topography. Generally, the substrate support includes a first side that supports the substrate and a second side. A ring and a plurality of substrate support pads project from the first side. The ring is disposed proximate the perimeter of the substrate...http://www.google.se/patents/US20020189940?utm_source=gb-gplus-sharePatent US20020189940 - SUBSTRATE SUPPORT WITH MULTILEVEL HEAT TRANSFER MECHANISM
