The invention generally relates to a processing system and related methods that include a chamber, a pedestal disposed in the chamber, a shadow ring and a set of alignment and support tabs which receive and directly align a substrate with a shadow ring, substantially independently of the pedestal. In...http://www.google.se/patents/US6555164?utm_source=gb-gplus-sharePatent US6555164 - Shadow ring and guide for supporting the shadow ring in a chamber
