Methods and apparatuses for electrochemical-mechanical processing of microelectronic workpieces. One embodiment of an electrochemical processing apparatus in accordance with the invention comprises a workpiece holder configured to receive a microelectronic workpiece, a workpiece electrode, a first remote...http://www.google.se/patents/US7153410?utm_source=gb-gplus-sharePatent US7153410 - Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
