A method for fabricating an LCD-TFT, which can prevent degradation of image quality of a liquid crystal display by preventing blackening of the pixel electrode due to H.sub.2 plasma at the time of deposition of a protective insulation film. The method includes the steps of forming a gate electrode on...http://www.google.se/patents/US5466618?utm_source=gb-gplus-sharePatent US5466618 - Method for fabricating a thin film transistor for a liquid crystal display