A diode-pumped, solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile. A high percentage of the shaped output (94) is focused through an aperture of a...http://www.google.se/patents/US6791060?utm_source=gb-gplus-sharePatent US6791060 - Beam shaping and projection imaging with solid state UV gaussian beam to form vias
