A gas isolation box including an enclosure; a number of gas sticks contained within the enclosure, each gas stick including a process gas section comprising a first process gas inlet valve for gating the flow of a process gas into the gas stick; a purge gas section including a purge valve for gating...http://www.google.se/patents/US6578600?utm_source=gb-gplus-sharePatent US6578600 - Gas isolation box
