An improved apparatus for preparing a coating by subjecting gaseous reactant precursors to a glow discharge is disclosed. The improvement comprises an electrode which is larger in all dimensions than the substrate which is to be coated. Electrically insulated magnets are arranged such that the area of...http://www.google.se/patents/US4512284?utm_source=gb-gplus-sharePatent US4512284 - Glow discharge apparatus for use in coating a disc-shaped substrate
