The present invention relates to an artificial latticed multi-layer film deposition apparatus for depositing on a substrate a gigantic magneto-resistive effect film (GMR film) having an artificial lattice structure formed of magnetic metal films and non-magnetic metal films alternately laminated one...http://www.google.se/patents/US6270633?utm_source=gb-gplus-sharePatent US6270633 - Artificial latticed multi-layer film deposition apparatus
