A process to reduce M1/N+ contact resistance includes a low temperature anneal step, after the aluminum interconnect is alloyed at 400.degree. C. During the low temperature anneal step, the temperature of the furnace tube is lowered from 400.degree. C. to 250.degree. C. over a period of two hours, after...http://www.google.se/patents/US5166095?utm_source=gb-gplus-sharePatent US5166095 - Low contact resistance process
