A test circuit is provided on a probe card or a wafer on which semiconductor chips to be tested are formed. The test circuit and each of the semiconductor chips to be tested are electrically connected to each other to perform testing, whereby the test can be carried out without using a tester. Conducting...http://www.google.se/patents/US6727723?utm_source=gb-gplus-sharePatent US6727723 - Test system and manufacturing of semiconductor device
