Carrier assemblies, planarizing machines with carrier assemblies, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, the carrier assembly includes a head having a chamber, a magnetic field source carried by the head,...http://www.google.se/patents/US20050260927?utm_source=gb-gplus-sharePatent US20050260927 - Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces
