A probe for testing very high frequency circuit chips (34) includes a flexible membrane (12) having test probe contacts (14), arranged to contact pads (32) on the device under test to bias up, drive and load down the circuit under test. Various optically-addressable devices (68,130,202) are mounted on...http://www.google.se/patents/US5583445?utm_source=gb-gplus-sharePatent US5583445 - Opto-electronic membrane probe
