A lithographic projection apparatus is disclosed. The apparatus includes a radiation system for providing a beam of radiation and a substrate holder for supporting a substrate to be placed in a beam path of the beam of radiation. The substrate holder includes a plurality of first protrusions, the distal...http://www.google.se/patents/US7113262?utm_source=gb-gplus-sharePatent US7113262 - Lithographic apparatus, device manufacturing method, and device manufactured thereby
