A prober for a semiconductor wafer includes a main body having an interface section connected to probe needles, a test head detachably attached to the interface section, and a manipulator for moving the test head. The manipulator includes X-, Y-, Z-, .theta.X-, .theta.Y-, and .theta.Z-positioning mechanisms...http://www.google.se/patents/US5506512?utm_source=gb-gplus-sharePatent US5506512 - Transfer apparatus having an elevator and prober using the same
