The method includes providing a substrate (18) having a semiconductor die (12) thereon, the semiconductor die having a major surface (23); disposing an input region (24) an active region (32) and a conductive region (34) on the major surface, the conductive region electrically coupling the input region...http://www.google.se/patents/US5854092?utm_source=gb-gplus-sharePatent US5854092 - Method for spray-cooling a tunable semiconductor device
