A method and apparatus for aligning and connecting objects, such as semiconductor components and substrates, are provided. The apparatus includes a hexapod with a moving platform for holding an object for movement in six degrees of freedom. The apparatus also includes a chuck assembly for holding a mating...http://www.google.se/patents/US6670818?utm_source=gb-gplus-sharePatent US6670818 - Method for aligning and connecting semiconductor components to substrates
