A silicon diaphragm piezoresistive pressure sensor having a diaphragm formed by a single-sided fabrication method. The pressure sensor is made up of a substrate on which there is a diaphragm at or near the surface of the substrate with a chamber under the diaphragm. The pressure sensor is fabricated...http://www.google.se/patents/US5242863?utm_source=gb-gplus-sharePatent US5242863 - Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same
