To provide a technique of firmly bringing a stylus and a test pad into contact with each other in carrying out a probe testing summarizingly for plural chips by using a prober having the stylus formed by a technique of manufacturing a semiconductor integrated circuit device, plane patterns of respective...http://www.google.se/patents/US7688086?utm_source=gb-gplus-sharePatent US7688086 - Fabrication method of semiconductor integrated circuit device and probe card
